S-3400N II Scanning Electron Microscope
The S-3400N Type II scanning electron microscope was manufactured by Hitachi High-Technologies Corp., (www.hitachi-hta.com), Pleasanton, CA. Applications include topographical and compositional imaging of sputter-coated/non-coated, conductive/non-conductive bulk or microscopic samples mounted on a variety of sample stubs under high vacuum or low vacuum conditions in the specimen chamber.
Specifications:
- Spatial resolution, 3 nm at 30 kV (high vacuum mode),
- 10 nm at 3 kV (high vacuum mode), 4 nm at 30 kV (low vacuum mode)
- Accelerating voltages- 0.3 kV to ~30 kV
- Specimen stage- 100 mm x translation, 50 mm y translation, 65 mm z range,
- Rotation range 3600, tilt range -20 to 900
- Magnification range- 5x to 300,000x
Features:
- Energy dispersive x-ray microanalysis system (Noran System Six 300, Thermo Electron Corp., Madison, WI)
- Eucentric, 5 axes motorized stage
- Secondary electron detector
- Backscatter detector
- Variable pressure environment mode
- Peltier specimen cold stage MK3, (Deben, Ltd)
- Automatic alignments, focus control and stigmation